Bor-Yuan Shew,: search on Z-Library

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1

Extreme UV diffraction grating fabricated by nanoimprint lithography

Lin, Chun-Hung, Lin, Yi-Ming, Liang, Chia-Ching, Lee, Yin-Yu, Fung, Hok-Sum, Shew, Bor-Yuan, Chen, Szu-Hung

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 852 KB

english, 2012

2

Oxidation Behaviors of PVD TiAlN Films

Lii, Ding-Fwu, Huang, Jow Lay, Shew, Bor-Yuan

Journal:

Key Engineering Materials

Year:

1997

File:

PDF, 164 KB

1997

3

EUV interferometric lithography and structural characterization of an EUV diffraction grating with nondestructive spectroscopic ellipsometry

Chun-Hung Lin, Chi-Hao Fong, Yi-Ming Lin, Yin-Yu Lee, Hok-Sum Fung, Bor-Yuan Shew, Jiann Shieh

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 1.36 MB

english, 2011

4

[IEEE 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Hsinchu (2015.6.29-2015.7.2)] 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits - Characteristic improvement of inkjet printed Ag interconnects using tape on-off and mirror-reaction processes

Zi-Li Guo,, Yu-Min Fu,, Yu-Ting Cheng,, Bor-Yuan Shew,, Pu-Wei Wu,

Year:

2015

Language:

english

File:

PDF, 823 KB

english, 2015

5

Effect of surface preparation on the radiation hardness of high-dielectric constant gate dielectric

Tsui, Bing-Yue, Su, Ting-Ting, Shew, Bor-Yuan, Huang, Yang-Tung

Journal:

Solid-State Electronics

Year:

2013

Language:

english

File:

PDF, 912 KB

english, 2013

6

Micrograting fabricated by deep x-ray lithography for optical communications

Journal:

Optical Engineering

Year:

2007

Language:

english

File:

PDF, 506 KB

english, 2007

7

Effects of Aluminum Concentration on the Oxidation Behaviors of Reactively Sputtered TiAlN Films

Jow-Lay Huang, Bor-Yuan Shew

Journal:

Journal of the American Ceramic Society

Year:

1999

Language:

english

File:

PDF, 763 KB

english, 1999

8

[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Flexible nanoporous anodic aluminum oxide(np-AAO) template coated with self-assembled Au nanocrown array for nanophotonic switching

Hong, Chitsung, Fang, Weileun, Shew, Bor-Yuan

Year:

2013

Language:

english

File:

PDF, 727 KB

english, 2013

9

Investigation of the flow characteristics within a micronozzle/diffuser

Yang, Kai-Shing, Chen, Ing-Young, Shew, Bor-Yuan, Wang, Chi-Chuan

Journal:

Journal of Micromechanics and Microengineering

Year:

2004

Language:

english

File:

PDF, 144 KB

english, 2004

10

Oxygen quenching effect in ultra-deep x-ray lithography with SU-8 resist

Shew, Bor-Yuan, Huang, Tai-Yuan, Liu, Kun-Pei, Chou, Chang-Pin

Journal:

Journal of Micromechanics and Microengineering

Year:

2004

Language:

english

File:

PDF, 201 KB

english, 2004

11

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Metrology, Inspection, and Process Control for Microlithography XXXI - Fabrication of metrology test structures with helium ion beam direct write

Sanchez, Martha I., Ukraintsev, Vladimir A., Lee, Chien-Lin, Chien, Sheng-Wei, Chen, Sheng-Yung, Liu, Chun-Hung, Tsai, Kuen-Yu, Li, Jia-Han, Shew, Bor-Yuan, Hong, Chit-Sung, Lee, Chao-Te

Year:

2017

Language:

english

File:

PDF, 1.55 MB

english, 2017

12

Real-time XRD and XAS investigation on the influences of vanadium additives to the structural chemical state evolutions of LiFePO 4 of a lithium-ion

Lee, Chih-Hao, Hu, Chih-Wei, Chen, Tsan-Yao, Su, Hui-Chia, Chiang, Ching-Yu, Shew, Bor-Yuan

Journal:

Acta Crystallographica Section A Foundations and Advances

Year:

2015

File:

PDF, 179 KB

2015

13

Evolution and Function of Dinosaur Teeth at Ultramicrostructural Level Revealed Using Synchrotron Transmission X-ray Microscopy

Wang, Chun-Chieh, Song, Yen-Fang, Song, Sheng-Rong, Ji, Qiang, Chiang, Cheng-Cheng, Meng, Qingjin, Li, Haibing, Hsiao, Kiko, Lu, Yi-Chia, Shew, Bor-Yuan, Huang, Timothy, Reisz, Robert R.

Journal:

Scientific Reports

Year:

2015

Language:

english

File:

PDF, 2.77 MB

english, 2015

14

High resolution x-ray micromachining using SU-8 resist

Shew, Bor-Yuan, Hung, Jui-Tang, Huang, Tai-Yuan, Liu, Kun-Pei, Chou, Chang-Pin

Journal:

Journal of Micromechanics and Microengineering

Year:

2003

Language:

english

File:

PDF, 461 KB

english, 2003

15

Real-time investigation of the structural evolution of electrodes in a commercial lithium-ion battery containing a V-added LiFePO4 cathode using in-situ neutron powder diffraction

Hu, Chih-Wei, Sharma, Neeraj, Chiang, Ching-Yu, Su, Hui-Chia, Peterson, Vanessa K., Hsieh, Han-Wei, Lin, Yu-Fang, Chou, Wu-Ching, Shew, Bor-Yuan, Lee, Chih-Hao

Journal:

Journal of Power Sources

Year:

2013

Language:

english

File:

PDF, 1.11 MB

english, 2013

16

The effects of heat treatment on the gas sensitivity of reactively sputtered SnO2 films

Jow-Lay Huang, Din-Wen Kuo, Bor-Yuan Shew

Journal:

Surface and Coatings Technology

Year:

1996

Language:

english

File:

PDF, 314 KB

english, 1996

17

Investigation of chemical reactions in TiB2/Si3N4 composites

Bor-Yuan Shew, Jow-Lay Huang

Journal:

Materials Science and Engineering: A

Year:

1992

Language:

english

File:

PDF, 909 KB

english, 1992

18

Real-time investigation on the influences of vanadium additives to the structural and chemical state evolutions of LiFePO4 for enhancing the electrochemical performance of lithium-ion battery

Hu, Chih-Wei, Chen, Tsan-Yao, Shih, Kai-Sheng, Wu, Pin-Jiun, Su, Hui-Chia, Chiang, Ching-Yu, Huang, An-Feng, Hsieh, Han-Wei, Chang, Chia-Chin, Shew, Bor-Yuan, Lee, Chih-Hao

Journal:

Journal of Power Sources

Year:

2014

Language:

english

File:

PDF, 2.25 MB

english, 2014

19

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Design and Microfabrication of Novel X-Ray Optics - Use of deep reactive ion etching in the fabrication of high-efficiency high-resolution crystal x-ray analyzers

Shew, Bor-Yuan, Huang, Ruey-Shing, Wang, Duan-Jen, Perng, Shen-Yaw, Kuan, Chien-Kuang, Cai, Yong Q., Chow, Paul C., Schwoerer-Boehning, Markus, Caliebe, Wolfgang, Kao, Chi-Chang, Chen, Chien Te, Manci

Year:

2002

Language:

english

File:

PDF, 753 KB

english, 2002

20

The effects of nitrogen flow on reactively sputtered TiAlN films

Bor-Yuan Shew, Jow-Lay Huang

Journal:

Surface and Coatings Technology

Year:

1995

Language:

english

File:

PDF, 590 KB

english, 1995

21

Modeling of reactively sputtered TiAlN films

Ding-Fwu Lii, Jow-Lay Huang, Bor-Yuan Shew

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 358 KB

english, 1998

22

Effects of r.f. bias and nitrogen flow rates on the reactive sputtering of TiA1N films

Bor-Yuan Shew, Jow-Lay Huang, Ding-Fwu Lii

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 1.73 MB

english, 1997

23

[ASME ASME 2003 1st International Conference on Microchannels and Minichannels - Rochester, New York, USA (April 24–25, 2003)] 1st International Conference on Microchannels and Minichannels - A Study of the Fabrication and Analysis of Micro Diffuser/Nozzles

Yang, Kai-Shing, Chen, Ing-Young, Shew, Bor-Yuan, Wang, Chi-Chuan

Year:

2003

Language:

english

File:

PDF, 257 KB

english, 2003

24

[IEEE 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Hsinchu, Taiwan (2014.4.28-2014.4.30)] Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Investigation of radiation hardness of HfO2 resistive random access memory

Bing-Yue Tsui,, Ko-Chin Chang,, Bor-Yuan Shew,, Lee, Heng-Yuan, Ming-Jinn Tsai,

Year:

2014

Language:

english

File:

PDF, 869 KB

english, 2014

25

Transfer of a continuous-relief lenticular array onto a quartz substrate by using SIL combined with the dry-etching method

Deng, Qing-Long, Chen, Chien-Yue, Lin, Wei-Li, Shew, Bor-Yuan, Chiang, Donyau, Tang, Yu-Hsiang, Lin, Bor-Shyh

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 1.22 MB

english, 2013

26

Study on diffraction effect and microstructure profile fabricated by one-step backside lithography

Yang, Wen-Cheng, Huang, Yu-Sheng, Shew, Bor-Yuan, Fu, Chien-Chung

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 3.80 MB

english, 2013

27

Quantitative AES investigation of magnetron sputtered Ti-Al-N films

Bor-Yuan Shew, Jow-Lay Huang

Journal:

Surface and Coatings Technology

Year:

1995

Language:

english

File:

PDF, 729 KB

english, 1995

28

Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substrates

Wang, Li-Min, Wang, Chih-Yi, Jheng, Ciao-Ren, Wu, Syu-Jhan, Sai, Chen-Kai, Lee, Ya-Ju, Chiang, Ching-Yu, Shew, Bor-Yuan

Journal:

Applied Physics A: Materials Science & Processing

Year:

2016

Language:

english

File:

PDF, 1.84 MB

english, 2016

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